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Electrochemical Work Station

Electrochemical Work Station

Environment Gloves Box（Ⅰ/Ⅱ/Ⅲ）

Environment Gloves Box（Ⅰ/Ⅱ/Ⅲ）

Water vapor can be pumped into the cabin to achieve saturated vapor pressure when the chip is injected liquid (aqueous solution), and inert gases such as nitrogen and argon can be combined with the cabin to improve the success rate of chip injection and improve the experimental efficiency. The size of the chip environment sample bin can be customized by customers.

High Vacuum Leak Checking Station

High Vacuum Leak Checking Station

The high-resolution digital microscopy system combined with the high vacuum pre-pumping system provides extremely high direct pressure resolution and leak detection sensitivity. Perfect simulation of the electron microscope environment, high detection sensitivity, can quickly check the sample rod and MEMS chip tightness, to ensure the safety of the electron microscope; It can also store the sample rod and keep it in a high vacuum state for a long time to reduce the pre-drawing time of the sample.

High-precision Chip Assembly Instrument

High-precision Chip Assembly Instrument

The high-precision chip assembler is used for the alignment package of the upper and lower chips of the chip. It has multi-dimensional motion functions such as xyz and rotation, which can realize the precise bonding of the upper and lower chips with "0" error and the external packaging operation. The independently adapted vacuum sample shifter can ensure the safe movement of the chip, prevent drops, and reduce chip damage. The high-resolution digital microscopy system is composed of an autofocus camera, a digital display screen, a high-resolution microscope, and a coaxial light source. It has the functions of taking photos and recording videos, and the resolution is better than 1 micron.

SEM Vacuum Transfer Chamber

SEM Vacuum Transfer Chamber

SEM Vacuum Transfer Chamber(SEM vacuum transfer Chamber) can transfer lithium electric materials, biological materials and other samples from the glove box to the scanning electron microscope sample chamber, with the advantages of small size, simple structure, vacuum seal, etc., to solve the vacuum transfer problem of air sensitive samples from sample preparation to characterization.

Volcano Series In-Situ Holders (Heating&Biasing&High Tilt)

Volcano Series In-Situ Holders (Heating&Biasing&High Tilt)

The Volcano Series In Situ Holders (Heating&Biasing&High Tilt) use MEMS chips to apply thermal and electric field control to the samples, and construct a thermoelectric composite multi field automatic control and feedback measurement system in a high angle sample stage. Combined with various modes such as EDS, EELS, SAED, HRTEM, STEM, etc., it achieves real-time and dynamic monitoring of key information such as microstructure, phase transition, element valence state, microstress, and atomic level structure and composition evolution of the samples under vacuum environment with temperature and electric field changes at the nano or even atomic level.

Breeze Series In-Situ Holders（Heating）

Breeze Series In-Situ Holders（Heating）

By applying thermal field control to the sample through MEMS chips, combined with various modes such as EDS, EELS, SAED, HRTEM, STEM, etc., key information such as microstructure evolution, reaction kinetics, phase transition, element valence, chemical changes, microstresses, and atomic level structure and composition evolution at the surface/interface of the sample can be monitored in real-time and dynamically at the nano or even atomic level in a gas environment.

Breeze Series In-Situ Holders（Optics&Heating）

Breeze Series In-Situ Holders（Optics&Heating）

A light source introduced through MEMS chips and optical fibers is used to construct a multi field automatic control and feedback measurement system for optical and thermal composite in the in-situ sample stage. By combining various modes such as EDS, EELS, SAED, HRTEM, STEM, etc., real-time and dynamic monitoring of the microstructure evolution, reaction kinetics, phase transition, element valence states, chemical changes of the sample under atmospheric environment with changes in light and thermal fields can be achieved at the nano or even atomic level key information such as microstresses and atomic level structure and composition evolution at the surface/interface.

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