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Breeze Series In-Situ Holders(Optics&Heating)

Product Features

A light source introduced through MEMS chips and optical fibers is used to construct a multi field automatic control and feedback measurement system for optical and thermal composite in the in-situ sample stage. By combining various modes such as EDS, EELS, SAED, HRTEM, STEM, etc., real-time and dynamic monitoring of the microstructure evolution, reaction kinetics, phase transition, element valence states, chemical changes of the sample under atmospheric environment with changes in light and thermal fields can be achieved at the nano or even atomic level key information such as microstresses and atomic level structure and composition evolution at the surface/interface.

  • Product composition
  • Unique Advantages
  • Functional Parameters
  • Application


    a.Breeze Series In-Situ Holders(Optics&Heating)
    b.MEMS Heating Gas Cell Chip
    c.Software of Thermal Controller
    d.Thermal Controller
    e.High Vacuum Leak Checking Station
    f.In-situ Nanofluidic Control System (Gas)
    g.High-precision Chip Assembly Instrument
    h.light Source Station
    i.Accessory Package



    High resolution in gas environments ·1.Using the original MEMS processing technology, the thickness of silicon nitride film in the chip window area can reach 10nm.
    ·2.The chip packaging adopts a double insurance method of bonding inner seal and epoxy resin outer seal, making the thinnest interlayer between the chips only about 100-200 nm. The ultra-thin interlayer greatly reduces interference with the electron beam, allowing for clear observation of the atomic arrangement of the sample, and achieving atomic level resolution in the gas environment..
    High security ·1.Adopting patented nanofluidic technology, fluid differential control is achieved through a piezoelectric micro control system to achieve nano upgraded micro fluid transportation. The redundant gas volume in the in-situ nanofluidic system and sample holder is only slightly increased, effectively ensuring the safety of the electron microscope.
    ·2.Adopt the polymer membrane surface contact sealing technology,compared with the O-ring sealing,the sealing contact area is incre ased,effectively reduce the risk of leakage.
    ·3.Using ultra-high temperature coating technology, the silicon nitride film in the window area of the chip has advantages such as high temperature resistance,low stress,pressure resistance, corrosion resistance,and radiation resistance.
    Excellent thermal performance ·1.High precision infrared temperature calibration, micron level high 
    resolution ther mal field measure ment and calibration,to ensure 
    the accuracy of temperature.
    ·2.Ultra-high frequency temperature control method, excluding the influence of wire and contact resistance, more accurate measurement of temperature and electrical parameters.
    ·3.The high stability have precious metal heating wire (non-ceramic 
    material) , it is not only a thermal gui de material but also a thermal 
    sensitive material. Its resistance has a good linear relationship with 
    tempe r.The heating area covers the whole observa tion area, 
    and the heating and cooling speed is fast,an d the thermal field is 
    stable and uniform.Temperature fluctuation in steady state less 
    ·4.Adopt the closed loop high-frequency dynamic control and 
    feedback of ambient temperature control square,high-frequency 
    feedback control to eliminate errors,tempe rature control accuracy 
    of ±0.01℃.
    ·5.Unique multi-stage composite heating MEMS chip design,control 
    the heat diffusion during heating process,greatly inhibit the heat 
    drift during heating process,to ensure the efficient observation of 
    the experiment .
    Excellent optical performance ·1.Adopt integrated laser light source, integrated UV-Vision-Infrared different bands and output specific wavelength laser.The output optical signal has high power (the maximum stren gth is not less than 150mW/cm),the light intensity can be adj usted rapidly and continuously,and the response time can rea ch millisecond level.
    ·2.Adopt special structure design, optical loss is very low,
    energy is stable and uniform.
    Intelligent software and automation equipment ·1.Man-machine separation and remote control of gas conditions can auto matically record experimental details for summary and review.
    ·2.Use custom program to control temperature rise.It can define more than 10 steps of heating procedures and constant temperature time,and can manually control the target temperature and time.When it is found that the temperature and constant temperature need to be changed during the heating process of the program,the ex perimental 
    scheme can be adjust ed immediately to improve the experimental efficiency.
    ·3.Built-in absolute temperature calibration program, each chip temperature control can be based on the change of resistance value to recurve fitting and correction, to ensure the accuracy of temperature measurement, ensure the reproducibility and reli ability of high temperature experiment.
    ·4.The whole process is equipped with precision automation equipment to assist manual operation and improve experimental efficiency.


  • Category Index Numerical value
    Basic parameters Shaft material High strength titanium alloy
    The number of electrodes 2
    Film thickness 20nm(standard) or 10nm(upgradeable)
    Applicable TEM brand Thermo Fisher/FEI, JEOL, Hitachi
    Applicable pole piece types ST, XT, T, BioT, HRP, HTP, CRP,FHP,WGP
     (HR)TEM/STEM Available
    (HR)EDS/EELS/SAED Available



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