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Spring Series In-Situ Holders(Heating)

Product Features

Using MEMS microfabrication technology to construct a liquid atmosphere nanolaboratory in an in-situ sample stage, the MEMS chip is heated and combined with various modes such as EDS, EELS, SAED, HRTEM, STEM, etc., to achieve real-time and dynamic monitoring of the microstructure evolution, reaction kinetics, phase transition, elemental valence state, chemical changes of the sample in the liquid atmosphere environment with temperature changes at the nano or even atomic level Key information such as microstresses and atomic level structure and composition evolution at the surface/interface.

  • Product composition
  • Unique Advantages
  • Functional Parameters
  • Application
  • a.Spring Series In-Situ Holders(Heating)
    b.Heating Liquid Cell Chip (Fluid)
    c.Heating Control Software
    d.Thermal Controller
    e.High-precision Chip Assembly Instrument
    f.High Vacuum Leak Checking Station
    g.In-situ Nanofluidic Control System (Liquid)
    h.Accessory Package
    i.Cleaning Instrument for Sample Holders
    j.Environment Gloves Box









    Highest resolution in the industry ·1.Using the original MEMS processing technology, the thickness of silicon nitride film in the chip window area can reach 10nm.
    ·2.The chip packaging adopts a double insurance method of bonding inner seal and epoxy resin outer seal, making the thinnest interlayer between the chips only about 100-200 nm. The ultra-thin interlayer greatly reduces interference with the electron beam, allowing for clear observation of the atomic arrangement of the sample, and achieving atomic level resolution in the liquid phase environment.
    ·3.Specially designed chip window shape can avoid the thickening of liquid layer caused by the bulging of silicon nitride film, which may affect the resolution.
    High security ·1.The common liquid sample holders of other brands on the market, due to the limitations of their own liquid pool chip design scheme, can only drive a large flow of liquid through the sample stage and the peripheral area of the chip through the huge pressure generated by the liquid pump, which poses a safety hazard of a large amount of liquid leakage. The liquid mainly enters the nano pores in the middle of the chip through diffusion effect, and there is no real flow rate control in the chip observation window.
    ·2.Adopting patented nanofluidic technology, fluid differential control is achieved through a piezoelectric micro control system to achieve nano upgraded micro fluid transportation. The redundant liquid volume in the in-situ nanofluidic system and sample holder is only slightly increased, effectively ensuring the safety of the electron microscope.
    ·3.Adopt the polymer membrane surface contact sealing technology,compared with the O-ring sealing,the sealing contact area is incre ased,effectively reduce the risk of leakage.
    ·4.Using ultra-high temperature coating technology, the silicon nitride film in the window area of the chip has advantages such as high temperature resistance, low stress, pressure resistance, corrosion resistance, and radiation resistance.
    Unique multi-field coupling technology ·It can realize multi-field coupling of light,electricity,heat and fluid in liquid phase environment.
    Excellent thermal properties ·1.High precision infrared temperature calibration, micron level high 
    resolution thermal field measurement and calibration,to ensure 
    the accuracy of temperature.
    ·2.The high stability have precious metal heating wire(non-ceramic material), it is not only a thermal guide material but also a thermal sensitive material. Its resistance has a good linear relationship with temperature.The heating area covers the whole observation area,and the heating and cooling speed is fast,and the thermal field is stable and uniform. Temperature fluctuation in steady state less than±0.01.
    ·3.Adopt the closed loop high-frequency dynamic control and feedback of ambient temperature control method,high-frequency feedback control to eliminate errors,achieving temperature control accuracy of ±0.01℃.
    ·4.Unique multi-stage composite heating MEMS chip design, control the heat diffusi on during heating process, greatly inhibit the heat drift 
    during heating process, to ensure the efficient observation of the 
    Intelligent software and automation equipment ·1.Man-machine separation, software remote adjustment laser band
    and intensity,program automatic control of tilt Angle.
    ·2.Custom program to control temperature rise,you can set more
    than 10 steps of temperature control program,you can also manually control the target temperature and time.When the temperature change or constant temperature is needed in the process of programmed heating,the experimental scheme can be adjusted immediately to improve the experimental efficiency.
    ·3.Built-in calibration program for absolute temperature scale,The chip can re-fit and correct the curve according to the change of resistance value each time to ensure the accuracy of temperature measurement,and ensure the reproducibility andreliability of high temperature test.
    ·4.The whole process is equipped with precision automation equipment to assist manual operation and improve experimental efficiency.
    Advantages of R&D team ·1.Team leaders participated in the development and complet ion 
    of in situ liquid phase TEM at the early stage of develop ment.
    ·2.Our team independently designed in-situ chips,mastered the core technology of chips,and owned multiple chip patents.
    ·3.Our team has more than 20 people engaged in in-situ liquid phase TEM research, which can provide technical support for in-situ experiments in multiple research directions.



  • Category Index Numerical value
    Basic parameters Shaft material High strength titanium alloy
    Film thickness 20nm(standard) or 10nm(upgradeable)
    Applicable TEM brand Thermo Fisher/FEI, JEOL, Hitachi
    Applicable pole piece types ST, XT, T, BioT, HRP, HTP, CRP
    Tilt max α=±20°(The Angle depends on the type of pole piece)
    (HR)TEM/STEM Available
    (HR)EDS/EELS Available



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