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SEM High Vacuum Leak Checking Station

Product Features

It is composed of a visual high vacuum leak detection chamber and a high vacuum pre-pumping system, which simulates the internal environment of the electron microscope, and can quickly check the tightness of the sample table and MEMS chip to ensure the safety of the electron microscope. Limit vacuum ≤8×10-7 hPa, leak detection operation vacuum ≤5.4×10-6 hPa.

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