• undefined
  • undefined

Volcano Series In-Situ Stages(Heating)

Product Features

The thermal field control is applied to the sample by MEMS chip, and the thermal field automatic control and feedback measurement system is constructed in the in-situ sample station, combined with EDS, EBSD and other different modes. Realize real-time and dynamic monitoring of key information such as microstructure, phase transition, element valence, microscopic stress, atomic structure and composition evolution of samples at the surface/interface with temperature change under vacuum environment from the nano or even atomic level.

  • Product composition
  • Unique Advantages
  • Functional Parameters
  • Application


    a.Volcano Series In-Situ Stages(Heating)
    b.Eletron Microscope Flange
    c. in-situ stage storage box
    d.MEMS Heating Chip
    e.Heating Control Software
    f.Thermal Controller
    g.Accessory Package





    High resolution · Original MEMS micro-machining process, the thickness of silicon nitride film in the window area of the heating chip can reach 10 nm, which can reach the limit resolution of scanning electron microscopy.
    Excellent thermal properties ·1. High precision infrared temperature measurement and calibration, micron level high resolution thermal field measurement and calibration, to ensure the accuracy of temperature.
    ·2. Ultra-high frequency temperature control method, excluding the influence of wire and contact resistance, more accurate measurement of temperature and electrical parameters.
    ·3. High stability precious metal heating wire (non-ceramic material) is used, which is both a thermal conductive material and a thermal sensitive material, its resistance has a good linear relationship with temperature, the heating area covers the entire observation area, the heating and cooling speed is fast, the thermal field is stable and uniform, and the temperature fluctuation is ≤±0.01℃ in a stable state.
    ·4. High frequency dynamic control of closed loop and feedback of ambient temperature control mode, high frequency feedback control to eliminate errors, temperature control accuracy of ±0.01℃.
    ·5. Unique multi-stage composite heating MEMS chip design, control heat diffusion during heating process, greatly inhibit heat drift during heating process, and ensure efficient observation of the experiment.
    ·6. The heating wire is coated with silicon nitride, which does not react with the sample to ensure the accuracy of the experiment.
    Intelligent software ·1. Man-machine separation, software remote control of gas conditions, automatic recording of experimental details, easy to summarize and review.
    ·2. Customize the program temperature curve. It can define more than 10 steps of heating procedures, constant temperature time, etc., and can manually control the target temperature and time. In the process of programmed heating, it is found that the temperature change and constant temperature are needed, and the experimental scheme can be adjusted immediately to improve the experimental efficiency.
    ·3. Built-in absolute temperature scale calibration program. Each chip can re-fit and correct the curve according to the change of resistance value each time to ensure the accuracy of measurement temperature and ensure the reproducibility and reliability of high temperature experiment.




  • Category Index Numerical value
    Basic parameter Shaft material High strength titanium alloy
    Drift rate <0.5nm/min
    Resolution  Sem limit resolution
    EDS/EBSD Available


    Learn more

  • Synthetic scheme for the prepa- ration of ZIF-67 crystals and GC


    SEM images, TEM images , and HRTEM images of GC (d−f),


    ZIF-67 after heated



Related Products